Microelectromechanical systems (MEMS), also known as microsystems technology in
Europe,
or micromachines in Japan, are a class of devices characterized both by their small
size
and the manner in which they are made. MEMS devices are considered to range in
characteristic length from one millimeter down to one micron – many times smaller
than
the diameter of a human hair.
MEMS will often employ microscopic analogs of common mechanical parts and tools; they
can
have channels, holes, cantilevers, membranes, cavities, and other structures.
However,
MEMS parts are not machined. Instead, they are created using micro-fabrication
technology similar to batch processing for integrated circuits.
Many products exist today that use MEMS technology, such as micro heat exchangers,
ink
jet printer heads, micro-mirror arrays for high-definition projectors, pressure
sensors,
infrared detectors, and many more.